Applications

Semiconductor Advanced Packaging

Semiconductor research and development

Semiconductor Failure Analysis

ESD Semiconductor Qualification

Semiconductor power devices

Semiconductor materials characterization

Key Features

Fast fault localization

Integrated PicoCurrent Imaging and Scanning Capacitance Microscopy (SCM) quickly identifies fault candidates for nanoprobing.

eFast guided operation

Semi-automated step by step guided operation for increased productivity, ease of use and reduced training burden.

No ebeam-sample interaction

Atomic force probes image and probe features, eliminating need for SEM imaging and vacuum system.

Technical Highlight

Capabilities

Proven nanoprobing solution for 5 nm technology.

Configurable with four, six or eight probes for added flexibility and capability.

Auto tip exchange and auto tip approach for increased productivity and ease of use. 

Measurement modes

The Hyperion II System’s advanced measurement modes include: 

Low-noise, high-resolution capacitance-voltage (C-V) to study oxide layers and interface traps.

Pulsed IV to identify open and resistive gate defects.

Elevated temperature probing to study device reliability.

Current voltage (I-V) measurements

Probing multiple transistors within the target area to localize a fault can be time-consuming. The Hyperion II System combines PicoCurrent imaging with I-V probing to quickly find potential defects and measure current-voltage curves, without introducing measurement-related shifts.

Capacitance voltage (C-V) measurements

C-V is used to study oxide layers, interface traps and charge carrier densities. The Hyperion II System offers high-resolution C-V with excellent impedance control, low leakage and very low noise.

Pulsed I-V measurements

Pulsed I-V is used for studying self-heating of SOI and trapped charge in high-k dielectric. The Hyperion II System enables high-speed testing of devices with less than 2 nanosecond rise time.

For more detail information of Hyperion II System, please visit the website: https://www.thermofisher.com/vn/en/home/electron-microscopy/products/electrical-failure-analysis-systems/hyperion-ii.html#techniques

Or directly contact to ADGroup