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Liên hệ ngayInstant
fusion of chemistry and imaging
Applications
Key
benefits
Live
compositional information:
Performs EDS by acquiring multiple signals simultaneously,
detecting the morphology and elemental makeup of a sample in real time
Always
ready to image:
Lets you stay focused on data collection
Improved
time to data:
Offers several imaging and scanning strategies to optimize
image acquisition and increase throughput
Flexible
stage:
Provides large sample capacity with a door that provides
access to the entire chamber, as well as a stage with a capacity of 10 kg.
Excellent
imaging performance
Offers optional low-vacuum mode and charge-mitigation using
beam deceleration mode
Easy
maintenance
Source exchange is easy and can be completed by any user,
while the straightforward design translates to high uptime and rapid service
when attention is needed.
Technical Highlights
Source |
•
High-performance thermal emission SEM column with tetrode source emission
geometry • Stable
electronically aligned column with fixed-objective aperture for ease of
operation • Fully
automatic filament exchange alignment procedure • 45°
objective lens geometry •
Through-the-lens differential pumping reduces beam skirting for the most
accurate analysis and highest resolution at low beam energies in low vacuum |
Electron
beam resolution |
•
High-vacuum imaging – 3.0 nm @
30 kV (SE) – 8.0 nm @
3 kV (SE) •
High-vacuum imaging with beam deceleration – 7.0 nm @
3 kV (BD mode (optional) + BSED) •
Low-vacuum imaging (optional) – 3.0 nm @
30 kV (SE) – 4.0 nm @ 30 kV (BSE) – 10 nm @ 3 kV (SE) |
Electron
beam parameter space |
• Beam current range:
up to 2 μA, continuously adjustable • Accelerating
voltage range: 200 V – 30 kV • Magnification: 5 to
1,000,000× (Polaroid) |
Chamber |
• Inner
width: 280 mm •
Analytical working distance: 10 mm • Ports: an
Axia ChemiSEM System configured with BSED and EDS offers five available ports
• EDS
take-off angle: 35° • Two
opposing EDS detectors possible • Coplanar
EDS/EBSD orthogonal to the tilt axis of the stage |
Detectors |
Detects up to four
signals simultaneously from any combination of the available detectors or
detector segments: • ETD: Everhart-Thornley SE detector • Retractable
under-the-lens backscatter detector • TrueSight X EDS
detector. Solid angle 13 mSr, resolution 129 eV, area 25 mm2. Optional
upgrade to TrueSight LX - 38 mSr, 132 eV, 70 mm² • Low-vacuum SE
detector (LVD), standard on LoVac model • IR camera for viewing sample in
chamber • Thermo Scientific
Nav-Cam™ Camera: color optical camera for sample navigation • Photon
Cathodoluminescence Detector for UI-integrated real color CL imaging
(optional) • Quasor II EBSD
detector with Thermo Scientific Pathfinder™ X-ray Microanalysis Software
(optional) • Current measurement
• Third party
detectors possible |
Vacuum
system |
• TMP, 1 ×
PVP • Patented
through-the-lens differential pumping •
Evacuation time: ≤2 minutes to high vacuum (requires nitrogen venting) and
and ≤4.5 minutes to low vacuum (optional) |
Sample
holders |
• Standard
multi-sample SEM holder uniquely mounts directly onto the stage, hosts up to
7 standard stubs (ø 12 mm), and does not require tools to mount a sample • Single stub holder |
Stage |
• Type:
5-axis motorized • XY:
120×120 mm • Motorized
Z: 55 mm • Rotation:
n×360° • Tilt:
-15° / +90° • Max.
sample height: – Clearance 72 mm to analytical working distance (10 mm), no
sample holder – Clearance 128 mm to analytical working distance (10 mm) with
ZTR axes removed • Max.
sample weight: – Up to 500 g XYZTR – Up to 2 kg XYZR – Up to 10 kg with ZTR
axes removed • Max.
sample size: – 138 mm diameter with full XY moves, rotation, no tilt (larger
samples possible with limited stage travel or rotation) |
System
control |
• 64-bit GUI with
Windows 10, keyboard, optical mouse • 24-inch LCD
display, WUXGA 1920×1200 (second monitor optional) • Customizable
graphical user interface, with up to four simultaneously active views • Navigation montage • Undo / Redo
functionality • User Guidance for
basic operations / applications |
Image
processor |
• Dwell
time range from 50 ns to 25 ms/pixel • Up to 6144×4096 pixels • File
type: TIFF (8-, 16-, 24-bit), JPEG or BMP •
Single-frame or 4-view image display • SmartSCAN
(256-frame average or integration, line integration and averaging, interlaced
scanning) • DCFI
(Drift Compensated Frame Integration) (optional) |
Optional
accessories |
• Beam deceleration
with stage bias -4,000 V • Manual user
interface • Joystick • Analysis: EDS,
EBSD, CL, Raman • Specimen current meter • Specimen holder kit • Acoustic enclosure
for vacuum pump • 7- or 52-pin
electrical feedthrough • Oil-free pre-vacuum
pumping • SEM start-up kit • Software controlled
1,100°C CleanHeater stage • Electrical probing
/ multi-probing stations |
Optional
software |
• Maps
Software for automatic large area acquisition using tiling and stitching;
correlative work •
AutoScript 4 Software—a Python-based application programming interface • TopoMaps
for image colorization, image analysis, and 3D surface reconstruction • Remote
control software • ChemiView
software for full EDS data processing |
Documentation |
• Video-guided
training • Online user
guidance • Operating
instructions handbook • Online help • Prepared for Thermo
Scientific RAPID™ Service (remote diagnostic support) |
Warranty
and Training |
• One-year
warranty • Choice of
service maintenance contracts • Choice of
operation / application training contracts |
Installation
requirements |
(Refer to preinstall
guide for detailed data) • Power: – Voltage
100–120 VAC or 200–240 VAC – Frequency 50 or 60 Hz – Consumption: |
Consumables
(partial list) |
Pre-centered
cathodes • Tungsten
filaments • Apertures
• Rotary
pump oil |
For more detail
applications of Axia CHEMISEM, please visit the website:
https://www.thermofisher.com/order/catalog/product/AXIA-CHEMISEM?SID=srch-srp-AXIA-CHEMISEM
Or directly contact to ADGroup