Source

• High-performance thermal emission SEM column with tetrode source emission geometry

• Stable electronically aligned column with fixed-objective aperture for ease of operation

• Fully automatic filament exchange alignment procedure

• 45° objective lens geometry

• Through-the-lens differential pumping reduces beam skirting for the most accurate analysis and highest resolution at low beam energies in low vacuum

Electron beam resolution

• High-vacuum imaging

– 3.0 nm @ 30 kV (SE)

– 8.0 nm @ 3 kV (SE)

• High-vacuum imaging with beam deceleration

– 7.0 nm @ 3 kV (BD mode (optional) + BSED)

• Low-vacuum imaging (optional)

– 3.0 nm @ 30 kV (SE)

– 4.0 nm @ 30 kV (BSE)

– 10 nm @ 3 kV (SE)

Electron beam parameter space

• Beam current range: up to 2 μA, continuously adjustable

• Accelerating voltage range: 200 V – 30 kV

• Magnification: 5 to 1,000,000× (Polaroid)

Chamber

• Inner width: 280 mm

• Analytical working distance: 10 mm

• Ports: an Axia ChemiSEM System configured with BSED and EDS offers five available ports

• EDS take-off angle: 35°

• Two opposing EDS detectors possible

• Coplanar EDS/EBSD orthogonal to the tilt axis of the stage

Detectors

Detects up to four signals simultaneously from any combination of the available detectors or detector segments: • ETD: Everhart-Thornley SE detector

• Retractable under-the-lens backscatter detector

• TrueSight X EDS detector. Solid angle 13 mSr, resolution 129 eV, area 25 mm2. Optional upgrade to TrueSight LX - 38 mSr, 132 eV, 70 mm²

• Low-vacuum SE detector (LVD), standard on LoVac model • IR camera for viewing sample in chamber

• Thermo Scientific Nav-Cam™ Camera: color optical camera for sample navigation

• Photon Cathodoluminescence Detector for UI-integrated real color CL imaging (optional)

• Quasor II EBSD detector with Thermo Scientific Pathfinder™ X-ray Microanalysis Software (optional)

• Current measurement

• Third party detectors possible

Vacuum system

• TMP, 1 × PVP

• Patented through-the-lens differential pumping

• Evacuation time: ≤2 minutes to high vacuum (requires nitrogen venting) and and ≤4.5 minutes to low vacuum (optional)

Sample holders

• Standard multi-sample SEM holder uniquely mounts directly onto the stage, hosts up to 7 standard stubs (ø 12 mm), and does not require tools to mount a sample

• Single stub holder

Stage

• Type: 5-axis motorized

• XY: 120×120 mm

• Motorized Z: 55 mm

• Rotation: n×360°

• Tilt: -15° / +90°

• Max. sample height: – Clearance 72 mm to analytical working distance (10 mm), no sample holder – Clearance 128 mm to analytical working distance (10 mm) with ZTR axes removed

• Max. sample weight: – Up to 500 g XYZTR – Up to 2 kg XYZR – Up to 10 kg with ZTR axes removed

• Max. sample size: – 138 mm diameter with full XY moves, rotation, no tilt (larger samples possible with limited stage travel or rotation)

System control

• 64-bit GUI with Windows 10, keyboard, optical mouse

• 24-inch LCD display, WUXGA 1920×1200 (second monitor optional)

• Customizable graphical user interface, with up to four simultaneously active views

• Navigation montage

• Undo / Redo functionality

• User Guidance for basic operations / applications

Image processor

• Dwell time range from 50 ns to 25 ms/pixel • Up to 6144×4096 pixels

• File type: TIFF (8-, 16-, 24-bit), JPEG or BMP

• Single-frame or 4-view image display

• SmartSCAN (256-frame average or integration, line integration and averaging, interlaced scanning)

• DCFI (Drift Compensated Frame Integration) (optional)

Optional accessories

• Beam deceleration with stage bias -4,000 V

• Manual user interface

• Joystick

• Analysis: EDS, EBSD, CL, Raman

• Specimen current meter

• Specimen holder kit

• Acoustic enclosure for vacuum pump

• 7- or 52-pin electrical feedthrough

• Oil-free pre-vacuum pumping

• SEM start-up kit

• Software controlled 1,100°C CleanHeater stage

• Electrical probing / multi-probing stations

Optional software

• Maps Software for automatic large area acquisition using tiling and stitching; correlative work

• AutoScript 4 Software—a Python-based application programming interface

• TopoMaps for image colorization, image analysis, and 3D surface reconstruction

• Remote control software

• ChemiView software for full EDS data processing

Documentation

• Video-guided training

• Online user guidance

• Operating instructions handbook

• Online help

• Prepared for Thermo Scientific RAPID™ Service (remote diagnostic support)

Warranty and Training

• One-year warranty

• Choice of service maintenance contracts

• Choice of operation / application training contracts

Installation requirements

(Refer to preinstall guide for detailed data)

• Power: – Voltage 100–120 VAC or 200–240 VAC – Frequency 50 or 60 Hz – Consumption:

Consumables (partial list)

Pre-centered cathodes

• Tungsten filaments

• Apertures

• Rotary pump oil